MKS PPCMA 带质量流量计的高性能下游压力控制器 (5 - 1000 Torr)
制造商: MKS Model: PPCMA - 报价要求
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Type: PPCMA Absolute Pressure Controller with Mass Flow Meter
Pressure Range: 5, 10, 20, 50, 100, 200, 500 or 1000 Torr Full Scale
Fitting Type: Swagelok® 4 VCR® Male
1.5 inch surface mount (C-seal)
Valve Position: Normally Closed
Valve Seat: PTFE (Teflon®), Elastomer (Viton®), Buna, Neoprene, EPDM
Flow Rate: 5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 (N2 equivalent)
Pressure Readout Units: Torr, kPa, mBar, psi
Pressure Resolution: 0.1 Torr
Pressure Control Accuracy: ±1.0% of Reading (≥10% Full Scale)
±0.2% of Full Scale (<10% Full Scale)
Transducer Over Pressure Limit: 2x Full Scale for all ranges
Maximum Differential Pressure: 45 psid
Burst Pressure: 1500 psig
Control Mode: Downstream
Pressure Measurement Accuracy: ±0.5% of Reading
Control Range: >5 to 100% of Full Scale
Typical Response Time: <1.0 second (excluding system time constant)
Operating Temperature: 10-50°C (50 to 122°F)
Storage Temperature: -20 to 80°C (-4 to 176°F)
Storage Humidity: 0 to 95% Relative Humidity, non-condensing
Flow Measurement Range: 2% to 100% of Full Scale
Flow Repeatability: ±0.3% of Reading
Flow Resolution: 0.1% of Full Scale
Flow Accuracy: ±1.0% of Reading >20% of Full Scale; ±0.2% of Full Scale (>20% of Full Scale flow)
(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Weight: <5 lbs (1.36 kg)
Compliance: CE
For specific range please check the attachment below!
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