MKS PPCMA 带质量流量计的高性能下游压力控制器 (5 - 1000 Torr)

Specifications

Type: PPCMA Absolute Pressure Controller with Mass Flow Meter

Pressure Range: 5, 10, 20, 50, 100, 200, 500 or 1000 Torr Full Scale

Fitting Type: 

Swagelok® 4 VCR® Male

1.5 inch surface mount (C-seal)

Valve Position: Normally Closed

Valve Seat: PTFE (Teflon®), Elastomer (Viton®), Buna, Neoprene, EPDM

Flow Rate: 5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 (N2 equivalent)

Pressure Readout Units: Torr, kPa, mBar, psi

Pressure Resolution: 0.1 Torr

Pressure Control Accuracy:

±1.0% of Reading (≥10% Full Scale)

±0.2% of Full Scale (<10% Full Scale)

Transducer Over Pressure Limit: 2x Full Scale for all ranges

Maximum Differential Pressure: 45 psid

Burst Pressure: 1500 psig

Control Mode: Downstream

Pressure Measurement Accuracy: ±0.5% of Reading

Zero Temperature Coefficient: ±0.02% of Full Scale/°C

Span Temperature Coefficient: ±0.04% of Reading/°C

Control Range: >5 to 100% of Full Scale

Typical Response Time: <1.0 second (excluding system time constant)

Operating Temperature: 10-50°C (50 to 122°F)

Storage Temperature: -20 to 80°C (-4 to 176°F)

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

External Leak Integrity: <1 x 10^-10 (scc/sec He)

Leak Integrity Through Closed Valve: <1.0% of orifice Full Scale

(Nitrogen at 25 psig on inlet to atmosphere)

(Nitrogen at 25 psig on inlet to atmosphere)

<0.1% of orifice Full Scale - Elastomer

Flow Measurement Range: 2% to 100% of Full Scale

Flow Repeatability: ±0.3% of Reading

Flow Resolution: 0.1% of Full Scale

Flow Accuracy: ±1.0% of Reading >20% of Full Scale; ±0.2% of Full Scale (>20% of Full Scale flow)

(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

Flow Span Temperature Coefficient: 

Span: <0.08% of Reading/°C

Flow Zero Temperature Coefficient:

Zero: <0.05% of Full Scale/°C

Wetted Materials:

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45, Inconel® 718, 825 Incoloy®

Optional: PTFE (Teflon) or Elastomer (Viton)

Surface Finish: <10 µinches, average Ra electropolished

Power Required: 

DeviceNet™: +11 to +25 VDC per (<4 watts)

EtherCAT®: +24 VDC (<5 watts)

Connector-Interface:

DeviceNet™: 5 pin micro connector (power and comm.)

EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)

Data Rate Switch:

DeviceNet™: 4 positions: 125, 250, 500K (Default), (programmable over network)

EtherCAT®: No switch

EtherCAT Communication Rate: 100 Mbps

DeviceNet Communication Rate: 125 Kbps, 250 Kbps, 500 Kbps

MAC ID Switches:

DeviceNet™: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254

EtherCAT®: 3 switches, 16 positions

Network Size:

DeviceNet™: Up to 64 nodes

EtherCAT®: Up to 4095 nodes

Indicators:

DeviceNet™: LED Network (green/red), LED Module (green/red)

EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)

Weight: <5 lbs (1.36 kg)

Compliance: CE

For specific range please check the attachment below!

Details

Literature


Drawing

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