MKS PPCMA 带质量流量计的高性能下游压力控制器 (5 - 1000 Torr)

Type: PPCMA Absolute Pressure Controller with Mass Flow Meter

Pressure Range: 5, 10, 20, 50, 100, 200, 500 or 1000 Torr Full Scale

Fitting Type: Swagelok® 4 VCR® Male

                     1.5 inch surface mount (C-seal)

Valve Position: Normally Closed

Valve Seat: PTFE (Teflon®), Elastomer (Viton®), Buna, Neoprene, EPDM

Flow Rate: 5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 (N2 equivalent)

Pressure Readout Units: Torr, kPa, mBar, psi

Pressure Resolution: 0.1 Torr

Pressure Control Accuracy: ±1.0% of Reading (≥10% Full Scale)

                                            ±0.2% of Full Scale (<10% Full Scale)

Transducer Over Pressure Limit: 2x Full Scale for all ranges

Maximum Differential Pressure: 45 psid

Burst Pressure: 1500 psig

Control Mode: Downstream

Pressure Measurement Accuracy: ±0.5% of Reading

Control Range: >5 to 100% of Full Scale

Typical Response Time: <1.0 second (excluding system time constant)

Operating Temperature: 10-50°C (50 to 122°F)

Storage Temperature: -20 to 80°C (-4 to 176°F)

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Flow Measurement Range: 2% to 100% of Full Scale

Flow Repeatability: ±0.3% of Reading

Flow Resolution: 0.1% of Full Scale

Flow Accuracy: ±1.0% of Reading >20% of Full Scale; ±0.2% of Full Scale (>20% of Full Scale flow)

(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

Weight: <5 lbs (1.36 kg)

Compliance: CE

For specific range please check the attachment below!