MKS NOVA-50A NOVA® 射频等离子发生器 (5 kW, 2 MHz)

Specifications

Type: RF Plasma Generator

Frequency Tuning Range: 2.00 MHz ±0.005%

Load Impedance Range: Unlimited

RF Stability/Spurious Output: Unconditionally stable for any load within operational limits <-50dBc

Harmonic Output & Distortion: <-40dBc

Load Mismatch Protection: Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.

Regulation Tolerance:

>500 W: <2.0% SP

<500 W: ±5.0 W

Input AC Power: 200/208 VAC, 3/PE~ (3W+G) 32A/PHASE

RF Connector: Type HN

Readout: Digital readout displays frequency and forward, reflected and load power.

Remote Digital Interface:

Standard: RS-232 Subminiature, Type-D 9-pin digital; optional custom interface cards available.

Rack Mounting: 19-inch adapters supplied

Cooling System: Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread.

Dimensions: 8.72" x 19" rack mount x 22.1" (221 x 483 x 560 mm.) (HxWxD) (excluding handles & connectors)

Weight: 91 lbs (41.3 kg)

Compliance: CE, UL 3111-1, CAN/CSA-C22.2 No.1010.1-92

For specific range please check the attachment below!

Details

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