MKS NOVA-50A NOVA® 射频等离子发生器 (5 kW; 2 MHz)

Frequency: 2.00 MHz ±0.005%

Dynamic Power Range: 10 - 5000 W

Power Output: 5.0 kW

Load Impedance Range: Unlimited

Harmonic Output & Distortion: <-40dBc

Regulation Tolerance: >500 W: <2.0% SP, <500 W: ±5.0 W

Input AC Power: 200/208 VAC, 3/PE~ (3W+G) 32A/PHASE

RF Connector: Type HN

Interface: Standard: RS-232 Subminiature, Type-D 9-pin digital; optional custom interface cards available.

Rack Mounting: 19-inch adapters supplied

Cooling System: Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread.

Dimensions: 8.72" x 19" rack mount x 22.1" (221 x 483 x 560 mm.) (HxWxD) (excluding handles & connectors)

Weight: 91 lbs (41.3 kg)

Compliance: NRTL Listed: UL3111-1 (1994), CAN/CSA C22.2 No. 1010.1-92, EN61010-1:1993, A2:1995, EN50081-2: 1992, EN50082-2: 1995