MKS DI-NH3 溶解氨输送系统 (1.0-3.0 barg)

Outlet Pressure: Configurable 1.0-3.0 barg (3.7barg with outlet pump)

Plumbing Materials: Liquid Wetted Surfaces: PFA, PTFE, quartz glass

                                Gas Wetted Surfaces: 316L stainless steel, PFA, PTFE

Communication: Binary in/out, RS232/RS485, analog 4-20 mA in/out, USB

Dimensions: Coated steel, approximately 1810 mm high, 800 mm wide, 610 mm deep (71.2 x 31.5 x 24.1 in.)

                    Overall height: approx. 2000 mm (79 in.)

Weight: 290-300 kg, depending on configuration

Compliance: CE, SEMI S2, SEMI F47, NRTL