MKS DI-CO2 Dissolved Carbon Dioxide Ultrapure Water Delivery System (1 - 3 barg)
制造商: MKS Model: DI-CO2 - 报价要求
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Flow Rate: Minimum total flow: 0.5 L/min (0.1 gpm)
Maximum total flow: 90 L/min (15.8 gpm)
Communication: Binary in/out (dry contacts), RS232, analog out, USB
Accuracy: Typical maximum deviation from set point:
+ Steady state flow: ±3%
+ Fluctuating flow: ±10% for flow changes <4 L/min per sec
UPW Temperature Range: 20 - 50°C
Outlet Pressure: 1.0 - 3.0 barg (0.1 - 0.3 MPag, 14.5 - 43.5 psig), depending on UPW supply pressure
Conductivity/Resistivity Range:
- Minimum conductivity 5 µS/cm, max. resistivity 200 kOhm*cm
- Maximum conductivity 50 µS/cm, min resistivity 20 kOhm*cm
Plumbing Materials: Liquid contacted surfaces: PFA, PVDF
Cabinet Material: PVDF or C-PVC or FRPP
Dimensions: 386 x 650 x 232 mm (WxHxD)
Weight: 17.3 kg
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