Fcon M1005-6S2-5L-AIR 气体流量控制器 (5SLM)

Flow range: 10, 20, 30, 50, 100, 200, 300, 500SCCM; 1, 2, 3, 5SLM

Gases: Air

Valve type: NO: Normally open

Accuracy: ±2％ F.S [※±1％ F.S Compatible]

Output signal: 0-5VDC

Repeatability: ±0.2％ F.S

Response: ≦6sec

Pressure resistance: 1MPa(G)

Operating temperature: 5-50℃, ≦85％RH (Scope of accuracy guarantee : 15-35℃)

Leak integrity: 1×10-7Pa･m3/sec He

Drive power source: +15VDC: 60mA, -15VDC: 150mA

Communication: Analog 0-5VDC

Wetted surface material: SUS316L, PTFE, Fluoro-Rubber

Seal material: Fluoro-Rubber

Standard fitting: 3/8in.SWL

Accessory: User's manual, Written Guarantee