MKS VISION-2000-C-XD 用于多压力和CVD/ALD工艺的高灵敏度RGA (1-300 amu)


Mass Range: 1-300 amu

Ion Source: High conductance closed ion source

Filaments: Independently replaceable twin Tungsten filaments

Mass Filter: Double filter (1-inch "RF only" pre-filter with 4-inch main filter)

Detector: Dual (Faraday and secondary electron multiplier)

Maximum Analyzer Operating Pressure: 1e^-3 Torr at the ion source inlet (standard), higher pressure optional

Minimum Detectable Partial Pressure: <2e^-11 Torr (for total pressures <1e^-4 Torr on baseline inlet)

Minimum Detectable Concentration: <15ppb specified with Argon or Nitrogen

Mass Stability: Better than ±0.1 amu over 8 hours

Resolution: Better than 10% valley between peaks of equal height throughout the mass range

Base Pressure Range: Ion source at maximum pressure at 1 mTorr, 10 mTorr or 100 mTorr

Process Pressure Range: Ion source at maximum pressure at 10 mTorr, 100 mTorr, 500 mTorr, 1.5 Torr, 5 Torr, 10 Torr, 40 Torr, 100 Torr or 700 Torr

Mounting Flange: DN35CF (70mm/2.75 inches OD) Conflat® flange

Vacuum Hardware: 60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, UniBloc™ inlet, automated vacuum control (RVC) completely interlocked and integrated

Backing Vacuum System:

Standard: Connected to the tool foreline pump via Surge Protect assembly with a KF16 fitting

Optional: Independent chemically resistant, dry diaphragm pump with KF16 fitting for connecting the exhaust to a suitable scrubber system

Bakeout Temperature and Bakeout Jacket: Included for 180°C bakeout

Operating Temperature: Electronics: 10-40°C

Weight: Control Module: 1.7 kg

Mechanical Support: Optional stands and brackets are available

Mobile RGA Platform: Optional RGA trolley to improve versatility (footprint 18x24 inches, 455x604mm)

Pneumatics: 60-80 psig CDA

Power Requirements: 88-264 VAC, 47/63 Hz, 600 Watts

Maximum Operating Conditions: 80% RH (non condensing)

LED Status Indication: Interlock status, filament emission, SEM, power and communications

I/O Capability: 4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control

Other Facilities: Leak check headset socket, external filament trip socket, instrument reset

Software: Process Eye® Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® xP, Vista, Server 2008 or Windows 7* (*recommended)

Communication: Ethernet CAT-5e

PC Requirements: Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.

Simultaneous Multi-Sensor: Process Eye Professional client/server configuration offers flexible multi-sensor operation.

Shipping Weight: 44 lbs (20 Kg)

Compliance: Compliant to RoHS Directive 2002/95/EC (control unit)

For specific range please check the attachment below!




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