MKS VISION-2000-A-XD ALD和CVD的高灵敏度RGA (1-100, 1-200, 1-300 amu)
制造商: MKS Model: VISION-2000-A-XD - 报价要求
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Mass Range: 1-100, 1-200, or 1-300 amu
Ion Source: High conductance closed ion source
Filaments: Independently replaceable twin Tungsten or Thoria filaments
Mass Filter: Double filter (1 in. "RF only" pre-filter with 4 in. main filter)
Detector: Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure: 1e-3 Torr at the ion source inlet (standard), higher pressure optional
Mass Stability: Better than ±0.1 amu over 8 hours
Resolution: Better than 10% valley for peaks of equal height across mass range
Operating Temperature: 70°C (controlled to ±1°C)
Weight: 33 lbs. (15 kg) to bolt on Process System
Mechanical Support: Optional stands and brackets are available
Pneumatics: 60-80 psig CDA
Electronics Weight on Flange: 1.7 kg
Power Requirements: 88 - 264 VAC, 47/63 Hz, 600 W
Maximum Operating Conditions: Electronics: 10 - 40°C, 80% RH (non condensing)
Communication: Ethernet CAT-5e
Shipping Weight: 132 lbs (60 Kg) may vary depending upon backing pump and instrument rack requirements
Compliance: CE, UKCA
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