MKS VISION-2000-A-XD ALD和CVD的高灵敏度RGA (1-100, 1-200, 1-300 amu)

Specifications

Mass Range: 1-100, 1-200, 1-300 amu

Ion Source: High conductance closed ion source

Filaments: Independently replaceable twin Tungsten or Thoria filaments

Mass Filter: Double filter (1 inch "RF only" pre-filter with 4 inch main filter)

Detector: Dual (Faraday and secondary electron multiplier)

Maximum Analyzer Operating Pressure: 1e^-3 Torr at the ion source inlet (standard), higher pressure optional

Minimum Detectable Partial Pressure: <1e^-12 Torr (for total pressures <1e^-4 Torr on baseline inlet

Minimum Detectable Concentration: <15 ppb (specified with Argon or Nitrogen for non-interfering peaks)

Mass Stability: Better than ±0.1 amu over 8 hours

Resolution: Better than 10% valley between peaks of equal height throughout the mass range

Base Pressure Range: Maximum inlet pressure can be chosen in the range of 10 mTorr to 10 torr

Process Pressure Range: Maximum inlet pressure can be chosen in the range of 100 mTorr to 760 torr. Please consult the factory for the exact range value closest to your desired pressure. *Inlets for <10 Torr can have optional gas flow acceleration.

Mounting Flange: DN35CF (70mm/2.75'' OD) Conflat® flange. Custom adapters can be provided

Vacuum Hardware: 67 l/s turbomolecular pump with high conductance analyzer housing, inlet system, modular UniBloc inlet, automated vacuum control (RVC), completely interlocked and integrated

Backing Vacuum System:

Standard: Connected to the tool foreline pump via Surge Protect assembly with a KF16 fitting

Optional: Independent chemically resistant, dry diaphragm pump with KF16 fitting for connecting the exhaust to a suitable scrubber system

Analyzer Housing Base Pressure: Better than 5e^-9 Torr after bakeout

UniBloc Maximum Temperature: Up to 150°C or up to 200°C

Bakeout Temperature and Bakeout Jacket: Included for 180°C bakeout of analyzer chamber

Operating Temperature: 70°C (controlled to ±1°C)

Weight: 33 lbs. (15 kg) to bolt on Process System

Mechanical Support: Optional stands and brackets are available

Mobile RGA Platform: Optional RGA trolley to improve versatility (footprint 18x24 in., 455x604 mm)

Pneumatics: 60-80 psig CDA

Electronics Weight on Flange: 1.7 kg

Power Requirements: 88-264 VAC, 47/63 Hz, 600 Watts

Maximum Operating Conditions: Electronics: 10-40°C, 80% RH (non-condensing)

LED Status Indication: Interlock status, filament emission, SEM, power and communications

I/O Capability: 4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control

Other Facilities: Leak check headset socket, external filament trip socket, instrument reset

Software: Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® 7, Server 2016 or Windows 10 (recommended)

Communication: Ethernet CAT-5e

PC Requirements: Intel® i5 3.1Ghz or AMD Ryzen 5 4.4Ghz, 8GB RAM, 512 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.

Simultaneous Multi-Sensor: Process Eye Professional client/server configuration offers flexible multi-sensor operation.

RGA to Vacuum System Cable Length: 33 ft. (10 m) standard RGA and 10 ft. (3m) with mobile RGA platform. Other lengths available dependent upon process system and customer requirements

Shipping Weight: 132 lbs (60 Kg) may vary depending upon backing pump and instrument rack requirements

Compliance: CE, UKCA

For specific range please check the attachment below!

Details

Literature


Drawing

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