MKS RPS-CH24P1-P24C 用于高流量应用的远程等离子体源 (24 kW)

Specifications

Type: RPS-CH24P1 Remote Plasma Source

Power Output: 24 kW

RF Frequency: 400 kHz

Accuracy: ±1% to power set point

Gas Supply During Ignition: Ar

NF3 Operation Reactant Output: 1-25 slm 20T

Compatible Species: NF3, O2, N2, Ar

Mixed Species Space: 30-90 slm

THD: <15%

Inlet Gas Connection: KF40

Outlet Gas Connection: KF50

Cooling Water Required: 

Remote Head: 3 gpm (11.36 Lpm)

DC Power Supply: 2 gpm (7.57 Lpm)

Control Interface:

Analog: DB25

Digital: EtherCAT

Power Requirements: 208 V, 3 phase 50/60 Hz, 75 Amps RMS max phase

Dimensions:

Remote Head: 22.02 x 10.76 x 11.1 in. (55.93 x 27.33 x 28.19 cm)

Power Supply: 21.24 x 19.00 x 7.0 in. (53.95 x 48.26 x 17.78 cm)

Weight:

Remote Head: 100 lbs. (45.36 kg)

Power Supply: 62 lbs. (28.12 kg)

Compliance: SEMI F47

For specific range please check the attachment below!

Literature

Drawing