MKS PPCA 带集成控制器的高性能压力控制阀 (10-1000 Torr)
制造商: MKS Model: PPCA - 报价要求
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Type: PPCA Absolute Pressure Controller
Pressure Range: 10, 20, 50, 100, 200, 500 or 1000 Torr Full Scale
Fitting Type: Swagelok® 4 VCR Male
Valve Seat: PTFE (Teflon®) or Elastomer (Viton®), Buna-N, Neoprene, EPDM
Flow Rate: 50, 200, 1000, 5000, 10000, 20000, 30000, 50000 (sccm)
Pressure Readout Units: Torr, kPa, mbar
Pressure Resolution: 0.1 Torr
Pressure Control Accuracy: ±1.0% of Reading (≥10% Full Scale)
±0.2% of Full Scale (<10% Full Scale)
Transducer Over Pressure Limit: 2x Full Scale for all ranges
Maximum Differential Pressure: 45 psid
Burst Pressure: 1500 psig
Pressure Measurement Accuracy: ±0.5% of Reading
Control Range: >5 to 100% of Full Scale
Typical Response Time: <1.0 second (excluding system time constant)
Operating Temperature: 10 to 50°C (50 to 122°F)
Storage Temperature: -20 to 80°C (minus 4 to176°F)
Storage Humidity: 0 to 95% Relative Humidity, non-condensing
Weight: <3 lbs (1.36 kg)
Compliance: CE
For specific range please check the attachment below!
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