Type: RF Plasma Generator
Frequency Tuning Range: 2.00 MHz ±0.005%
Load Impedance Range: Unlimited
RF Stability/Spurious Output: Unconditionally stable for any load within operational limits <-50dBc
Harmonic Output & Distortion: <-40dBc
Load Mismatch Protection: Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.
>500 W: <2.0% SP
<500 W: ±5.0 W
Input AC Power: 200/208 VAC, 3/PE~ (3W+G) 32A/PHASE
RF Connector: Type HN
Readout: Digital readout displays frequency and forward, reflected and load power.
Remote Digital Interface:
Standard: RS-232 Subminiature, Type-D 9-pin digital; optional custom interface cards available.
Rack Mounting: 19-inch adapters supplied
Cooling System: Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread.
Dimensions: 8.72" x 19" rack mount x 22.1" (221 x 483 x 560 mm.) (HxWxD) (excluding handles & connectors)
Weight: 91 lbs (41.3 kg)
Compliance: CE, UL 3111-1, CAN/CSA-C22.2 No.1010.1-92
For specific range please check the attachment below!