MKS HMPX60S-MKS 大功率微波等离子体源 ( 6 kW, 2,440-2,470 MHz, Sapphire)

Specifications

Maximum Plasma Power Output: 6.0 kW

Frequency: 2,440-2,470 MHz

Ripple: 2,440-2,470 MHz

Output Accuracy: <1% closed loop control

Ambient Temperature: Up to 40°C max

Generator to Head Distance: Up to 100 feet max

Microwave Connections: WR284F waveguide with CPR284F flanges

Power Requirements: 200-208 VAC, 3 phase, 50/60 Hz

Autotune: <1.5 seconds with <2% reflected power

Chemistries: O2, N2H2, N2, H2O, NH3, H2

Applicator Material: Quartz or Sapphire

Gas Flow Range: 1 - 10 slm

Operating Pressure: 1 - 10 Torr

Communications: Analog, RS485

Compliance: CE

Configuration: KF40, custom

Cooling: Water: 1 GPM, 20-30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)

Power Supply Generator Dimensions: (7U rack) 19 H x 12.2 W x 20.03 D in. (482.6 x 309.88 x 508.76 mm)

Power Head Magnetron Head Dimensions: 9.85 H x 9.85 W x 16 D in. (250.19 x 250.19 x 406.4 mm)

Power Head Magnetron Head Cooling: Water: 1 GPM, 20-30°C, 71 PSI max

Regulation: Better than 1% of output power (line and load)

For specific range please check the attachment below!

Details

Literature


Drawing

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