MKS HMPSS-MKS 大功率微波等离子体源 (6 kW, Sapphire)

Specifications

Type: High Power Plasma Source

Plasma Tube Material: 

HMPSQ-MKS: Quartz

HMPSS-MKS: Sapphire

Operating Frequency: 2.44-2.47 GHz

Maximum Power: 6 kW

Operating Pressure: 1-10 Torr

Total Gas Flow: 1-10 slm

Minimum Water Flow: 0.50 gpm at min 37 psid

Waveguide: WR284

Waveguide Flange Connection: CPR284F with bolts

Water Inlet Connection: 3/8 inch Swagelok®

Water Outlet Connection: 3/8 inch Swagelok®

Electrical Requirements for UV Lamp: 24 VDC, 1.0 Amp

Gas Line Connection: 4 VCR® male

Dimensions: 18.52 x 4.5 x 6.32 inches

Weight: 18 lbs

Compliance: CE

For specific range please check the attachment below!

Details

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