Specifications
Type: GPCA Absolute Pressure Controller
Pressure Range: 500 Torr, 1000 Torr, 2000 Torr, 100 psia Full Scale
Fitting Type: Swagelok® 4 VCR Male
1-1/8 inch surface mount (C-seal, W-seal)
1/4 inch Swagelok compression seal
Valve Position: Normally Closed
Valve Seat: PTFE (Teflon®)
Flow Rate: 50, 200, 1000, 5000, 10000, 20000, 30000, 50000 (sccm)
Pressure Readout Units: Torr, kPa, psi, mbar
Pressure Resolution: 0.1 Torr
Pressure Control Accuracy:
±1.0% of Reading (≥10% Full Scale)
±0.2% of Full Scale (<10% Full Scale)
Transducer Over Pressure Limit: 2x Full Scale for all ranges
Maximum Differential Pressure: 45 psid
Burst Pressure: 1500 psig
Control Mode: Upstream or Downstream
Pressure Measurement Accuracy: ±0.5% of Reading
Zero Temperature Coefficient: ±0.02% of Full Scale/°C
Span Temperature Coefficient: ±0.04% of Reading/°C
Control Range: >2 to 100% of Full Scale
Typical Response Time: <1.0 second
Operating Temperature: 10-50°C (50-to 122°F)
Storage Temperature: -20-80°C (-4-176°F)
Storage Humidity: 0 to 95% Relative Humidity, non-condensing
External Leak Integrity: <1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve: <1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
Wetted Materials:
Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45
Optional: PTFE (Teflon) Valve Seat
Surface Finish: <10 µinches, average Ra electropolished
Power Required:
DeviceNet™: +11 to +25 VDC per (<4 watts)
EtherCAT®: +24 VDC (<5 watts)
RS485: +15 to +24 VDC(<4 watts)
Connector-Interface:
DeviceNet™: 5 pin micro connector (power and comm.)
EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
RS485: 9 pin Type D male (power and comm.)
Data Rate Switch:
DeviceNet™: 4 positions: 125, 250, 500K (Default), (programmable over network)
EtherCAT®: No switch
RS485 No switch (set data rate via RS485)
EtherCAT Communication Rate: 100 Mbps
DeviceNet Communication Rate: 125 Kbps, 250 Kbps, 500 Kbps
RS485CommunicationRate: 9.6 Kbps,19.2 Kbps,38.4 Kbps
MAC ID Switches:
DeviceNet™: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
EtherCAT®: 3 switches, 16 positions
RS485: Set address over RS485 - Station Addresses 0,0 to 9,9
Network Size:
DeviceNet™: Up to 64 nodes
EtherCAT®: Up to 4095 nodes
RS485: Up to 32 nodes
Indicators:
DeviceNet™: LED Network (green/red), LED Module (green/red)
EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)
RS485: LED Comm (yellow), LED Error (red)
Weight: <3 lbs (1.36 kg)
Compliance: CE
For specific range please check the attachment below!
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