MKS GPCA 通用压力控制器 (500 Torr - 100 psi)

Specifications

Type: GPCA Absolute Pressure Controller

Pressure Range: 500 Torr, 1000 Torr, 2000 Torr, 100 psia Full Scale

Fitting Type: Swagelok® 4 VCR Male

1-1/8 inch surface mount (C-seal, W-seal)

1/4 inch Swagelok compression seal

Valve Position: Normally Closed

Valve Seat: PTFE (Teflon®)

Flow Rate: 50, 200, 1000, 5000, 10000, 20000, 30000, 50000 (sccm)

Pressure Readout Units: Torr, kPa, psi, mbar

Pressure Resolution: 0.1 Torr

Pressure Control Accuracy: 

±1.0% of Reading (≥10% Full Scale)

±0.2% of Full Scale (<10% Full Scale)

Transducer Over Pressure Limit: 2x Full Scale for all ranges

Maximum Differential Pressure: 45 psid

Burst Pressure: 1500 psig

Control Mode: Upstream or Downstream

Pressure Measurement Accuracy: ±0.5% of Reading

Zero Temperature Coefficient: ±0.02% of Full Scale/°C

Span Temperature Coefficient: ±0.04% of Reading/°C

Control Range: >2 to 100% of Full Scale

Typical Response Time: <1.0 second

Operating Temperature: 10-50°C (50-to 122°F)

Storage Temperature: -20-80°C (-4-176°F)

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

External Leak Integrity: <1 x 10^-10 (scc/sec He)

Leak Integrity Through Closed Valve: <1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)

Wetted Materials:

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45

Optional: PTFE (Teflon) Valve Seat

Surface Finish: <10 µinches, average Ra electropolished

Power Required:

DeviceNet™: +11 to +25 VDC per (<4 watts)

EtherCAT®: +24 VDC (<5 watts)

RS485: +15 to +24 VDC(<4 watts)

Connector-Interface:

DeviceNet™: 5 pin micro connector (power and comm.)

EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)

RS485: 9 pin Type D male (power and comm.)

Data Rate Switch: 

DeviceNet™: 4 positions: 125, 250, 500K (Default), (programmable over network)

EtherCAT®: No switch

RS485 No switch (set data rate via RS485)

EtherCAT Communication Rate: 100 Mbps

DeviceNet Communication Rate: 125 Kbps, 250 Kbps, 500 Kbps

RS485CommunicationRate: 9.6 Kbps,19.2 Kbps,38.4 Kbps

MAC ID Switches:

DeviceNet™: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254

EtherCAT®: 3 switches, 16 positions

RS485: Set address over RS485 - Station Addresses 0,0 to 9,9

Network Size:

DeviceNet™: Up to 64 nodes

EtherCAT®: Up to 4095 nodes

RS485: Up to 32 nodes

Indicators:

DeviceNet™: LED Network (green/red), LED Module (green/red)

EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)

RS485: LED Comm (yellow), LED Error (red)

Weight: <3 lbs (1.36 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Manual

Drawing