MKS GPCA 通用压力控制器 (500~2000 Torr; 50~50000sccm)
制造商: MKS Model: GPCA - 报价要求
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Type: GPCA Absolute Pressure Controller
Pressure Range: 500 Torr, 1000 Torr, 2000 Torr, 100 psia Full Scale
Fitting Type: Swagelok® 4 VCR Male
1-1/8 inch surface mount (C-seal, W-seal)
1/4 inch Swagelok compression seal
Valve Position: Normally Closed
Valve Seat: PTFE (Teflon®)
Flow Rate: 50, 200, 1000, 5000, 10000, 20000, 30000, 50000 (sccm)
Pressure Readout Units: Torr, kPa, psi, mbar
Pressure Resolution: 0.1 Torr
Pressure Control Accuracy: ±1.0% of Reading (≥10% Full Scale)
±0.2% of Full Scale (<10% Full Scale)
Transducer Over Pressure Limit: 2x Full Scale for all ranges
Maximum Differential Pressure: 45 psid
Burst Pressure: 1500 psig
Control Mode: Upstream or Downstream
Pressure Measurement Accuracy: ±0.5% of Reading
Control Range: >2 to 100% of Full Scale
Typical Response Time: <1.0 second
Operating Temperature: 10-50°C (50-to 122°F)
Storage Temperature: -20-80°C (-4-176°F)
Storage Humidity: 0 to 95% Relative Humidity, non-condensing
Weight: <3 lbs (1.36 kg)
Compliance: CE
For specific range please check the attachment below!
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