MKS GHW-12 高可靠性射频等离子体发生器 (1.25 kW, 13.56 MHz)

Specifications

Type: GHW Series 13.56 MHz RF Plasma Generator

Frequency: 13.56MHz ±0.005%

Power Output:

GHW-12: 1250 W

Load Impedance Range: Unlimited

RF Stability/Spurious Output: Unconditionally stable for any load within operational limits < -45dBc

Harmonic Output & Distortion: < -40dBc

Load Mismatch Protection:

GHW-12: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.

Regulation Tolerance:

GHW-12: >125 W: ±1.5% SP, <125 W: ± 3.0 W

Input AC Power:

GHW-12: 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE

RF Connector: Type N

Interface:

Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available.

Readout: Digital readout displays frequency and forward, reflected and load power.

Rack Mountins: EIA (Standard) 19-inch adapters supplied

Cooling System:

GHW-12: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.

Dimensions:

GHW-12: 3.5 inches x 19 inches rack mount x 20.0 inches (89 x 483 x 508 mm.)

(H x W x D, excluding handles & connectors)

Weight:

GHW-12: 32.5 lbs. (14.8 kg)

Compliance: CE, CAN/CSA-C22.2 No. 61010-1, UL 61010-1

For specific range please check the attachment below!

Details

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