MKS GHW-12 高可靠性射频等离子体发生器 (1.25kW; 13.56MHz)

Frequency: 13.56MHz ±0.005%

Dynamic Power Range: 10 - 1250 W

Power Output: 1.25 kW

Load Impedance Range: Unlimited

RF Stability/Spurious Output: Unconditionally stable for any load within operational limits < -45dBc

Harmonic Output & Distortion: < -40dBc

Regulation Tolerance: >125 W: ±1.5% SP, <125 W: ± 3.0 W

Input AC Power: 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE

RF Connector: Type N

Interface: Standard: RS-232 Subminiature Type-D 9-pin digital, optional custom interface cards available.

Rack Mountins: EIA (Standard) 19-inch adapters supplied

Cooling System: Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread

Dimensions: Rack Mount: 3.5 x 19 x 20.0 inches (89 x 483 x 508 mm) (HxWxD)

Weight: 32.5 lbs. (14.8 kg)