MKS ELITE-600FP-01 elite™ 射频等离子体发生器 (600W; 13.56MHz; Profibus)

Frequency: 13.56 MHz ±0.005%

Dynamic Power Range: 1 - 600 W

Power Output: 600 W

Output Stability: -20 dBc

Accuracy: ±2 W (1-100 W), ±2% (101W - 600W)

Input AC Power: 110 - 253 VAC, Single phase, 50Hz/60Hz

RF Connector: Type N

Interface: Profibus, RS232

Remote Digital Interface: RS-232 via DB9F

Analog Interface: 25-pin DB25F

Cooling: Air-cooled

Operating Temperature: 5 - 40°C

AC Input Connector: IEC Compliant Inlet

LED Indicators: PWR and STAT on rear panel

Watts Nominal into 1.1:1: 600 W

Watts Nominal into 1.5:1: 600 W

Watts Nominal into 2:1: 486 W

Watts Nominal into 3:1: 384 W

Watts Nominal into inf:1: 200 W

Dimensions: 2U, full rack: 17 x 15 x 3.5 inches (WxDxH)

                    3U, half rack: 8.5 x 15 x 5.25 inches (WxDxH)

Weight: 9.2 kg