MKS ELITE-600FP-01 elite™ 射频等离子体发生器 (600 W, 13.56 MHz)

Specifications

Type: elite 13.56 MHz RF Plasma Generators

Frequency: 13.56 MHz

Accuracy: ±0.005%

Load Impedance Range: 200 - 750 W, depending on model

Harmonic Output & Distortion: -20 to -30 dBc

Harmonic Output: -30 dBc

Input AC Power:

Single phase, 110VAC - 253VAC, 50Hz/60Hz

RF Connector: Type N

Remote Digital Interface: RS-232 via DB9F

Analog Interface: 25-pin DB25F

Cooling: Air-cooled

Operating Temperature: 5 - 40°C

Set Point Response Time: <10ms (analog)

Power Switch: Front Panel Switch

AC Input Connector: IEC Compliant Inlet

LED Indicators: PWR and STAT on rear panel

Watts Nominal into 1.1:1: 

elite 600: 600 W

Watts Nominal into 1.5:1: 

elite 600: 600 W

Watts Nominal into 2:1:

elite 600: 486 W

Watts Nominal into 3:1: 

elite 600: 384 W

Watts Nominal into inf:1:

elite 600: 200 W

Rack Size: elite 750 & 600: 2U, full rack

Dimensions: elite 750 & 600: 17 in. W x 15 in. D x 3.5 in. H

Weight: 9.2 kg

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing