MKS E-VISION-2 高压残余气体分析仪 (1-100 or 1-200 amu)

Specifications

Type: Residual Gas Analyzer

Measurement Technique: Mass Spectrometry

Mass Range: 1-100 or 1-200 amu

Filaments: Tungsten or Thoria Coated Iridium

Software: Built-in web applications allowing RGA control and data acquisition without installed software using web browser on any PC

Optional Easy View Software available

Filter length: 4 in. (100 mm)

Maximum Analyzer Operating Pressure: 1e^-4 Torr (1.3e^-4 mbar)

Ion Source Sensitivity: 2e^-4 A/mbar

Minimum Detectable Concentration: 2e^-11 Torr (2.6e^-11 mbar) Faraday

5e^-14 Torr (6.7e^-14 mbar) Multiplier

Mass Stability: ±0.1 amu over 8 hours at stable ambient

Bake Out Temperature: 250°C with electronics removed

Operating Temperature: 

200°C Faraday only with electronics 10-40°C

150°C Multiplier with electronics 10-40°C and pressure <1e^-8 mbar

90°C Multiplier with electronics 10-40°C and pressure <1e^-5 mbar

Data Acquisition Method: Dedicated realtime acquisition processor

Data Acquisition Speed: <3ms per point for analog scans

Data Collection Methods: 

Analog scanning, full mass range 8, 16 or 32 points/amu

Barchart scanning

Peak-jump collection of up to 15 peaks per scan

Settling Time: <20ms

Control Method: CE operating system processor with web-server interface

Command Structure: Documented ASCII command protocols

Electron Energy & Emission Current: 40 or 70eV fixed (set in web configuration)

Filament Protection: Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe

Communication: 10/100 Base-T Ethernet, static or automatically assigned IP addresses

Compliance: CE (control unit)

For specific range please check the attachment below!

Details

Literature


Drawing

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