MKS AX8580 SEMOZON® 全集成模块化臭氧输送系统 (50 slm)

Specifications

Type: Ozone Gas Delivery System

Ozone Output: >400g/Nm3

Flow Rate: 2.5 gpm per generator

Feed Gas: Oxygen, Nitrogen

Feed Gas Supply Pressure: 70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm2) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm2) maximum N2 pressure 10 psi higher than O2 pressure

Feed Gas Purity: 99.9995% minimum

Operating Temperature: 5 - 40°C (41 - 104°F)

Cooling Water Temperature Required: 5 - 17°C

Cooling Water Filtration Required: 100 microns

Cooling Water Quality Required: 1 - 3 MΩcm DI

Cooling Water Minimum Flow Required: 2.5 gpm per generator

Cooling Water Connections Required: 1 in. compression (Swagelok®)

Cooling Water Heat Load Required: 5 kw per generator

Voltage Requirements: 208 volts AC (±10%), three phase

Current Requirements: 65 Amps max (fully populated system)

Frequency: 50/60 Hz

Exhaust Flow Rate: Two-generator system requires 125 CFM (3.5m3/min), Four-generator system requires 250 CFM (7m3/min), Static Pressure 125CFM (3.5m3/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m3/min)

Exhaust Type: SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)

Exhaust Static Pressure: 0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet

Control Air Pressure: 70 - 100 psig (483 - 689 kPa)

Control Air Type: CDA or dry nitrogen, 40µ filtered

Control Air Fitting: 0.25 in. compression (Swagelok®)

Exhaust Connection: 6 in. diameter duct opening standard

Dimensions: 26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)

Relative Humidity: 30 - 90% (non - condensing)

Weight: 705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller

Compliance: ETL 9700614, SEMI S2-0715

Altitude: Up to 1000 m (3280 ft) above mean sea level

For specific range please check the attachment below!

Details

Literature


Drawing


Application note

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