MKS AX8410 SEMOZON® PRIME 臭氧发生器 (5 - 80 slm)
制造商: MKS Model: AX8410 - 报价要求
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Ozone Output: up to 335 g/Nm3
Flow Rate: 5 - 80 slm
Feed Gas: Oxygen: Grade 6 or better O2
Nitrogen: 100 - 1000 ppm Grade 5 or better N2
Nominal Cell Pressure (Delivery): 15 - 45 psig (100 - 310 kPa)
Pressure: 20 - 50 psig
Control Interface: Front panel control and remote operation
Cooling Water Temperature: 5 - 25°C (41 - 77°F)
Cooling Water Filtration: 100 microns
Cooling Water Quality: Resistivity ≥50 KΩ/cm
Minimum Water Flow: 22.7 lpm (6.0 gpm)
Voltage Requirements: 208 VAC (±10%) 3Ø & Ground, no Neutral
Current Requirements: 50 Amps
Frequency: 50/60 Hz
Weight: 77 kg (170 lb)
Dimensions: 483 x 521 x 267 mm (19.0 x 20.5 x 10.5 in) (width x depth x height)
Compliance: CE, UL/CSA, and SEMI F47
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