MKS AX7710MKS-01 Paragon® Flow智能远程等离子源 (8 slm, NF3)

Specifications

Type: AX7710MKS-01 Remote Plasma Source

Gas Supply During Ignition: 100% Ar for ignition only

Gas Supply Post Ignition: Up to 8 slm of NF3 (post ignition NF3 can be added and the Ar removed)

NF3 Operation Reactant Output: >95% dissociation across operating space, 1-10T, 1-8 slm

O2: NF3 Mix Operation Reactant Output>95% dissociation across operating space, 1-10T, 1-8 slm

Process Gas Feed & Exhaust: Inlet Gas Connection KF40, Outlet Gas Connection KF50

Duty Cycle: 2 sec on time minimum to 100% (process times >45 minutes)

Gas Flow:

During Ignition: 1 to 8 Torr @ 1 to 5 slm for Ar

Post Ignition: 1 to 10 Torr @ 1 to 8 slm for NF3

Wetted Materials: PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina

Operating Temperature: Ambient air 40°C max.

Cooling Water Required: 2.0 gpm, <30°C

Control Interface: EtherCAT and analog I/O 25 pin D

Power Requirements: 208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)

Dimensions: 18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)

Weight: 54 lb. (24.5 Kg)

Compliance: CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1

For specific range please check the attachment below!

Details

Literature


Drawing


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