MKS AX7710MKS-01 Paragon® Flow智能远程等离子源 (8 slm; NF3)

Type: Remote Plasma Source

Gas Supply During Ignition: 1 - 8 Torr @ 1 - 5 slm for Ar

Gas Supply Post Ignition: 1 - 10 Torr @ 1 - 8 slm

NF3/ O2: NF3 Mix Operation Reactant Output: >95% dissociation across operating space, 1 - 10T, 1 - 8 slm

Ignition Gas Supply: 100% Ar

Process Gas Feed & Exhaust: Inlet: KF40

                                                 Outlet: KF50

Duty Cycle: 2 sec on time minimum to 100% (process times >45 minutes)

Gas Flow: 8 slm, NF3 Flow

Wetted Materials: PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina

Operating Temperature: Ambient air 40°C max.

Cooling Water Required: 2.0 gpm, <30°C

Control Interface: EtherCAT and analog I/O 25 pin D

Power Requirements: 208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)

Dimensions: 18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)

Weight: 54 lb. (24.5 Kg)

Compliance: NRTL, CE Safety (EN61010-1, UL 61010-1, CSA C22.2.61010-1), CE EMC (EN61326-1, EN61000-6-2, EN61000-6-4), Semi F47, Semi S2 Safety (S8, S10, S14)