MKS AX7696MKS-01 R*evolution® 远程等离子源 (10 slm)

Type: AX7696MKS-01 Remote Plasma Source

Ignition Window Pressure: 1.0 to 4.0 Torr, Gas: In Process Gas

Process Gas: O2, N2., Max Total Gas Flow: 10 slm

Operating Pressure: 0.5 to 4 torr

Duty Cycle: 100%

Interlocks: Internal thermal switch and internal water flow switch to protect against insufficient cooling

Wetted Materials; 6061-T6 Aluminum, Kalrez®, SiO2, 316L SS, Nickel, Fluorosilicone

Control Interface: Analog, EtherCAT

Power Requirements: 208 VAC, 50/60 Hz, 30A, 3 phase

Cooling Water: 1.75 gpm, <30°C Ambient 40°C max.

Dimensions: 15.7 x 13.7 x 12.14 inches (399mm x 348mm x 308mm nominal)

Weight: 81 lb. (38.6 Kg)

Compliance: CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1