MKS AX7610Q Downstream化学等离子体源 (3kW; Quartz)
制造商: MKS Model: AX7610Q - 联系
Maximum Power: 3.0 kW
Electrical Requirements for UV Lamp: 24 VDC, 1.0 Amp
Cooling: Water (3/8 in. Swagelok® fitting) 0.35 gpm, 30°C Max at 30psid minimum
Gas Line Connection: 1/4 or 3/8 inch VCR®
Output Flange: KF40, KF50 or custom
Process Gas Supply:
- Quartz Tube: O2, N2, H2O, Ar, non-fluorine based gases and perating pressure 1 to 8 Torr typical
- Sapphire Tube: O2, N2, H2O, Ar, NF3, CF4, C2, F6, and other Fluorine based gases
Operating pressure* 2 to 8 Torr typical
Dimensions: 15.3 in (388 mm) Long
Weight: 10 lb. (4.5 kg)
Details
- 质量承诺
- 正品保修
- 送货到家
- 交易简单化
