MKS AX7610Q Downstream化学等离子体源 (3 kW, Quartz)

Specifications

Type: AX7610 Downstream Plasma Source

Maximum Power: 3.0 kW

Electrical Requirements for UV Lamp: 24 VDC, 1.0 Amp

Cooling: Water (3/8 in. Swagelok® fitting) 0.35 gpm, 30°C Max at 30psid minimum

Gas Line Connection: 1/4 or 3/8 inch VCR®

Output Flange: KF40, KF50 or custom

Process Gas Supply:

Quartz Tube: O2, N2, H2O, Ar, non-fluorine based gases and perating pressure 1 to 8 Torr typical

Sapphire Tube: O2, N2, H2O, Ar, NF3, CF4, C2F6, and other Fluorine-based gases and operating pressure 2 to 8 Torr typical

Dimensions: 15.3 in (388 mm) Long

Weight: 10 lb. (4.5 kg)

For specific range please check the attachment below!