MKS 649B 带质量流量计的下游压力控制器 (10~1000 Torr)
制造商: MKS Model: 649B - 报价要求
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Type: 649 Pressure Controller with Capacitance Manometer and Mass Flow Meter
Pressure Range: 10, 20, 50, 100, 1000 mmHg (Torr) Full Scale
Flow Rate: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 sccm (Full Scale)
Trip Points: Pressure: Two open-collector transistors
Rated: 250 mA @ 30 VDC
Adjustable: 1 to 100% of Full Scale
Hysteresis: 3% of Full Scale
Indicators: Green LEDs on when actuated
Pressure Control Accuracy: ±0.2% of Full Scale
Transducer Over Pressure Limit: 45 psia or 2x Full Scale, whichever is greater
Pressure Measurement Accuracy: ±0.5% of Reading (includes linearity, hysteresis, and repeatability)
Control Range: 2 to 100% of Full Scale
Typical Response Time: 1.0 sec (excluding system time constant)
Operating Temperature: 0 to 50°C (32 to 122°F)
Storage Temperature: -20 to 80°C (-4 to 176°F)
Flow Measurement Range: 1% to 100% of Full Scale
Flow Repeatability: ±0.2% of Full Scale
Flow Resolution: 0.1% of Full Scale
Flow Accuracy: ±1.0% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Input Power: ±15 VDC ±5%, 300 mA max.
Connector: 15-pin male Type “D"
Meter Response Time: <100 msec
Input-Output Signals:
Pressure: 0-10 VDC default (user settable to 0-5 VDC)
Cable Length: 100 ft. (30 m) max.
Compliance: CE
For specific range please check the attachment below!
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