MKS 649B 带质量流量计的下游压力控制器 (10 - 1000 Torr)

Specifications

Type: 649 Pressure Controller with Capacitance Manometer and Mass Flow Meter

Pressure Range: 10, 20, 50, 100, 1000 mmHg (Torr) Full Scale

Valve Orifice: 50, 200, 1000, 5000 sccm (nominal Full Scale flow rates for N2 with 15 psig on inlet and atmospheric pressure on outlet)

Flow Rate: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 sccm (Full Scale)

Trip Points: 

Pressure: Two open-collector transistors

Rated: 250 mA @ 30 VDC

Adjustable: 1 to 100% of Full Scale

Hysteresis: 3% of Full Scale

Indicators: Green LEDs on when actuated

Pressure Control Accuracy: ±0.2% of Full Scale

Transducer Over Pressure Limit: 45 psia or 2x Full Scale, whichever is greater

Maximum Differential Pressure: 150 psi (consistent with transducer overpressure limit)

Control Mode: Downstream

Pressure Measurement Accuracy: ±0.5% of Reading (includes linearity, hysteresis, and repeatability)

Zero Temperature Coefficient: ±0.04% of Full Scale/°C

Span Temperature Coefficient: ±0.04% of Reading/°C

Control Range: 2 to 100% of Full Scale

Typical Response Time: 1.0 sec (excluding system time constant)

Operating Temperature: 0 to 50°C (32 to 122°F)

Storage Temperature: -20 to 80°C (-4 to 176°F)

Flow Measurement Range: 1% to 100% of Full Scale

Flow Repeatability: ±0.2% of Full Scale

Flow Resolution: 0.1% of Full Scale

Flow Accuracy: ±1.0% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

Flow Span Temperature Coefficient: < 0.08% of Reading/°C

Flow Zero Temperature Coefficient: < 0.05% of Full Scale/°C

Flow Reading Pressure Coefficient: <0.02% of Reading/psi

Input Power: ±15 VDC ±5%, 300 mA max.

Connector: 15-pin male Type “D"

Meter Response Time: <100 msec

Meter Warm-up Time: <2 min (within 0.2% of Full Scale steady state)

RFI Sensitivity: SAMA 33.1, 1-abc: <0.2% of Full Scale

Input-Output Signals:

Pressure: 0-10 VDC default (user settable to 0-5 VDC)

Cable Length: 100 ft. (30 m) max.

Compliance: CE

For specific range please check the attachment below!

Details

Literature


Manual

  • 质量承诺
  • 正品保修
  • 送货到家
  • 交易简单化