MKS 392 Micro-Ion® Plus 模块化真空压力传感器 (1 x 10^-9 Torr to atmosphere)


Absolute Measurement Range: 

1 x 10^-9 Torr to atmosphere

1.33 x 10^-9 mbar to atmosphere

1.33 x 10^-7 Pascal to atmosphere

(air or N2)

Type: Vacuum Transducer

Sensor: Micro-Ion Ionization Sensor and Pirani Conductron Sensor

Operating Temperature: 10 - 40°C (50 - 104°F)

Maximum Bakeout Temperature: 105°C (221°F) maximum, with electronics removed

Storage Temperature: -40 to +70°C (-40 to +158°F)

Analog Output: Logarithmic, 0.5 to 7.0 VDC, 0.5 V/decade

Internal Volume: 10.8 cc

Exposed Materials: 304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass

Electronic Casing and Flange: Aluminum Extrusion with Powder-coat

Compliance: RoHS, CE

Filament: Tungsten or yttria-coated iridium

X-ray Limit:

3 x 10-10 Torr

4 x 10-10 mbar

4 x 10-8 Pascal

Emission Current: Autoranging

Degas: Electron bombardment; 3 Watts for 1 minute/filament

For specific range please check the attachment below!




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