MKS 356 Micro-Ion® Plus 真空压力传感器 (1 x 10^-9 Torr to atmosphere)

Specifications

Sensor Type: Micro-Ion® Gauge

Measurement Range: 

1 x 10^-9 Torr to atmosphere

1 x 10^-9 mbar to atmosphere

1 x 10^-7 Pa to atmosphere

(Air and N2)

Repeatability: <5% of reading from 1 x 10^-8 Torr to 50 Torr

Accuracy: <15% of reading from 1 x 10^-8 Torr to 50 Torr (N2)

Filament: Yttria-coated iridium

Operating Temperature: 10 - 40°C

Bake Out Temperature: 150°C (with electronics removed)

Storage Temperature: -40 to 70°C

Relays: Two single-pole, double-throw relays (SPDT)

Relay Contact Rating: 1 A at 30 VDC resistive, non-inductive

Relay Response: 1 x 10^-9 to 50 Torr; 1 x 10^-9 to 70 mbar; 1 x 10^-7 Pa to 7 kPa

Power Requirements: 24 VDC ±15%, 26 W max

Exposed Materials: 304 stainless steel, tantalum, tungsten, nickel, nickel iron alloy, borosilicate glass

Case Material: Aluminum extrusion

Internal Volume: 10.8 cc

Weight: 567 gm (20 oz) with NW16KF flange

Display: 2 digits plus exponent, green LED (optional)

Ion Gauge Degas: Electron bombardment, 3.75 W with 2-minute timer

Ion Gauge Emission Current: Autoranging

Ion Gauge Auto On Setting: 2 x 10^-2 Torr; 3 x 10^-2 mbar; 3 Pa, on decreasing pressure

Ion Gauge Auto Off Setting: 3 x 10^-2 Torr; 4 x 10^-2 mbar; 4 Pa, on increasing pressure

Switch to Low Emission Setting: 1 x 10^-5 Torr; 1 x 10^-5 mbar; 1 x 10^-3 Pa, on increasing pressure

X-ray Limit: <3 x 10^-10 Torr; <4 x 10^-10 mbar; <4 x10^-8 Pa

Compliance: CE

For specific range please check the attachment below!

Details

Literature


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