MKS 317 对流增强型皮拉尼真空压力传感器 (1,0 x 10^-3 - 1,0 x 10^+3 Torr)

Specifications

Sensor Type: Convection-Enhanced Pirani

Measurement Range:

1.0 x 10^-3 to 1.0 x 10^+3 Torr

1.3 x 10^-3 to 1.3 x 10^+3 mbar

1.3 x 10^-1 to 1.3 x 10^+5 Pascal

Set Point Range:

2.0 x 10^-3 to 9.5 x 10^+2 Torr

2.7 x 10^-3 to 1.2 x 10^+3 mbar

2.7 x 10^-1 to 1.2 x 10^+5 Pascal

Resolution: 1% of indicated decade

Reproducibility: 5% of indicated pressure

Connector: 9-pin Type "D"

Operating Temperature: 0° to 50°C (32° to 122°F)

Bake Out Temperature: 100° C non-operating without cable and electronics

Exposed Materials: 304 stainless steel, nickel 200, glass, platinum

Internal Volume: 8.0 cc

Weight: 0.5 lb (0.2 kg), 1.34 lb (0.52 kg) with a 23/4 inch CF flange

For specific range please check the attachment below!

Details

Literature


Drawing

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