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Fcon C1020-4S2-10-N2 气体流量控制器 (10SCCM)

Flow range: 10,20 SLM

Gases: N2

Valve type: NO: Normally open

Flow rate control range: 5-100% F.S

Accuracy: ±2% F.S [※±1% F.S Compatible]

Setting signal: 0.25-5VDC

Output signal: 0-5VDC

Repeatability: ±0.2% F.S

Response: ≦6sec

Pressure resistance: 1MPa(G)

Operating temperature: 5-50℃, ≦85%RH (Scope of accuracy guarantee : 15-35℃)

Leak integrity: 1×10-7Pa・m3/sec He

Drive power source: +15VDC: 60mA, -15VDC: 150mA

Communication: Analog 0-5VDC

Wetted surface material: SUS316L, PTFE, Fluoro-Rubber

Seal material: Fluoro-Rubber

Actuator system: Thermal

Standard fitting: 1/4in.SWL

Accessory: User's manual, Written Guarantee

Details

Datasheet

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